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レーザーのネオンガスを再利用する新機能「hTGM」で産業界に貢献
栃木県小山市； 2016年2月17日—リソグラフィ光源の主要メーカーであるギガフォトン株式会社（本社: 栃木県小山市、代表取締役社長: 都丸仁）は、本日同社の主要製品であるKrFエキシマレーザー向けの、ネオンガスリサイクルシステム「hTGM」を開発し、今月中にフィールド評価を開始すると発表しました。
現在、最先端の半導体製造プロセスで使用されているKrFおよびArFエキシマレーザーでは、レーザーガス全体の96%以上を占めるバッファガスにネオンが使用されています。しかしながら2015年より続く世界的なネオンの供給不足により、ネオンガスが入手困難となり価格も5～20倍に急騰しました。(*1)それを受けギガフォトンでは、2015年7月、顧客の安定した大量生産サポートのため「ネオンガスレスキュープログラム」を開始しました。
このたびギガフォトンは、このプログラムの3つのメニューのうち、2016年に開始すると発表した、ネオンガスリサイクルシステム「hTGM」を開発、今月フィールドでの評価を開始します。hTGMは、半導体工場で稼働するレーザー配管に直接接続し、レーザーで使用したガスを収集後、不純物を取り除き、再びレーザーに注入するというレーザーガスの再利用を可能にしたエコ・システムであり、レーザー装置の稼働には影響を与えることなく、最大の再生率を提供します。また1台につきレーザーを5台まで接続することができる効率的な仕様となっています。現在2月末よりユーザー先でKrF レーザー向けの評価を開始することが決まっており、順次ArF レーザーにも適用していく予定です。
ギガフォトン代表取締役社長兼CEOの都丸仁氏は、こう述べています。「hTGMは、当社のグリーンイノベーションロードマップであるEcoPhoton™プログラムに沿って開発されました。半導体の大量生産を支えるレーザーメーカーとして、ギガフォトンは今後もhTGMのような、半導体製造の安定的・継続的な稼働に貢献し、かつ限りある資源を守ることができる技術を開発していきます。」
(*1)当社調査による。
EcoPhoton™プログラムについて
EcoPhoton™プログラムは、環境に優しくユーザーフレンドリーなリソグラフィ光源を提供するために、ギガフォトンが2003年以来策定・実現しているロードマップです。このプログラムではレーザーの稼働コストを、①消耗部品により発生するコスト、②ダウンタイムにより発生するコスト、③環境負荷のコストの3種類に分類し、それぞれのコスト要因を詳細に分析、新技術の投入により継続的なコスト低減を目指します。
ギガフォトンについて
2000年設立以来、ギガフォトンはレーザーサプライヤーとして、価値あるソリューションを世界の半導体メーカーに提供し続けています。ギガフォトンは、研究開発から製造・販売・保守サービスまで、常にユーザー目線に立った業界最高水準のサポートをお約束します。詳細についてはwww.gigaphoton.comをご覧ください。
報道関係者向けの連絡窓口：
ギガフォトン株式会社
経営企画部
松井章記
TEL: 0285-37-6931
Eメール: web_info@gigaphoton.com
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Company Contributes to the Manufacturing Sector with hTGM, Providing New Capabilities to Recycle the Neon Gas Used in Lasers
Oyama, Tochigi; February 17, 2016 — Gigaphoton Inc. (Head Office: Oyama, Tochigi; President & CEO: Hitoshi Tomaru), a leading manufacturer of light sources used in lithography, has announced the commencement of field testing for “hTGM,” a neon gas recycling system designed for KrF excimer lasers, one of the company’s core products.
In KrF and ArF excimer lasers, which are used in advanced semiconductor manufacturing processes, neon accounts for over 96% of laser gases used as the buffer gas. However, the cost of neon gas has risen sharply, reaching 5 to 20 times previous prices1 due to difficulty in obtaining it, a situation brought about by a worldwide neon supply shortage that has continued since 2015. In response to the situation, in July of 2015 Gigaphoton launched the “Neon Gas Rescue Program” in order to provide support to customers in sustaining stable high-volume manufacturing environments.
Of the three program options Gigaphoton previously announced plans of launching in 2016, the company has now completed development of its neon gas recycling system “hTGM,” and will begin field evaluations of the system this month. hTGM makes it possible to reuse laser gas by connecting directly to the conduit of lasers in operation at semiconductor plants, collecting the used gas, removing impurities, and then re-injecting it back into the laser. This system is both eco-friendly and provides the greatest possible recycling rate without impacting the operation of laser equipment. hTGM also features an extremely efficient design that allows up to five lasers to be connected to a single unit. At present, the company has decided to begin evaluations for KrF lasers at user facilities from the end of February, after which it plans to progressively apply the system to ArF lasers as well.
Hitoshi Tomaru, President & CEO of Gigaphoton says, “hTGM has been developed in accordance with our EcoPhoton™ program, which serves as our company’s green innovation roadmap. As a laser manufacturer that supports the high-volume manufacturing of semiconductors, Gigaphoton is committed to continuing the development of technologies that contribute to stable, continuous operation in semiconductor manufacturing while also making it possible to conserve limited resources.”
1: Based on a company survey
About the EcoPhoton™ program
The EcoPhoton™ program is a roadmap, envisioned and realized by Gigaphoton, which has been operating since 2003. The program is intended to provide lithography light sources that are both eco-friendly and user-friendly. In the EcoPhoton™ program, laser operating costs are first separated into three categories: (1) costs incurred by consumable parts, (2) costs incurred by downtime, and (3) costs incurred due to environmental impact. The primary cause of costs in each of these categories is then subjected to a detailed analysis, and new technologies are introduced to achieve the program’s goal of continually reducing costs.
About Gigaphoton
Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit www.gigaphoton.com.
Media contact:
Gigaphoton Inc.
Akinori Matsui, +81-285-37-6931
Corporate Planning Division
web_info@gigaphoton.com[:cs]
Company Contributes to the Manufacturing Sector with hTGM, Providing New Capabilities to Recycle the Neon Gas Used in Lasers
Oyama, Tochigi; February 17, 2016 — Gigaphoton Inc. (Head Office: Oyama, Tochigi; President & CEO: Hitoshi Tomaru), a leading manufacturer of light sources used in lithography, has announced the commencement of field testing for “hTGM,” a neon gas recycling system designed for KrF excimer lasers, one of the company’s core products.
In KrF and ArF excimer lasers, which are used in advanced semiconductor manufacturing processes, neon accounts for over 96% of laser gases used as the buffer gas. However, the cost of neon gas has risen sharply, reaching 5 to 20 times previous prices1 due to difficulty in obtaining it, a situation brought about by a worldwide neon supply shortage that has continued since 2015. In response to the situation, in July of 2015 Gigaphoton launched the “Neon Gas Rescue Program” in order to provide support to customers in sustaining stable high-volume manufacturing environments.
Of the three program options Gigaphoton previously announced plans of launching in 2016, the company has now completed development of its neon gas recycling system “hTGM,” and will begin field evaluations of the system this month. hTGM makes it possible to reuse laser gas by connecting directly to the conduit of lasers in operation at semiconductor plants, collecting the used gas, removing impurities, and then re-injecting it back into the laser. This system is both eco-friendly and provides the greatest possible recycling rate without impacting the operation of laser equipment. hTGM also features an extremely efficient design that allows up to five lasers to be connected to a single unit. At present, the company has decided to begin evaluations for KrF lasers at user facilities from the end of February, after which it plans to progressively apply the system to ArF lasers as well.
Hitoshi Tomaru, President & CEO of Gigaphoton says, “hTGM has been developed in accordance with our EcoPhoton™ program, which serves as our company’s green innovation roadmap. As a laser manufacturer that supports the high-volume manufacturing of semiconductors, Gigaphoton is committed to continuing the development of technologies that contribute to stable, continuous operation in semiconductor manufacturing while also making it possible to conserve limited resources.”
1: Based on a company survey
About the EcoPhoton™ program
The EcoPhoton™ program is a roadmap, envisioned and realized by Gigaphoton, which has been operating since 2003. The program is intended to provide lithography light sources that are both eco-friendly and user-friendly. In the EcoPhoton™ program, laser operating costs are first separated into three categories: (1) costs incurred by consumable parts, (2) costs incurred by downtime, and (3) costs incurred due to environmental impact. The primary cause of costs in each of these categories is then subjected to a detailed analysis, and new technologies are introduced to achieve the program’s goal of continually reducing costs.
About Gigaphoton
Since it was founded in 2000, Gigaphoton has delivered valuable solutions to semiconductor manufacturers throughout the world as a laser supplier. In every stage from R&D to manufacture, sales, and maintenance services, Gigaphoton is committed to providing world-class support delivered from the perspective of everyday users. For more information please visit www.gigaphoton.com.
Media contact:
Gigaphoton Inc.
Akinori Matsui, +81-285-37-6931
Corporate Planning Division
web_info@gigaphoton.com
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