Presenting advanced Research at the premier conference on semiconductor technology
Oyama, Tochigi; February 13, 2025, Gigaphoton Inc. (Head Office: Oyama, Tochigi; President and CEO: Tatsuo Enami), a manufacturer of lightsources for semiconductor lithography, will be participating in SPIE Advanced Lithography + Patterning 2025, which will take place in San Jose, California from Sunday, February 23 through 27, 2025 PST.
Gigaphoton will present developments in next-generation ArF immersion lightsource driving yield improvements, Gigaphoton’s sustainability solution, and availability improvements with DUV lightsource technologies. In addition, Gigaphoton will provide updates on EUV lightsource technology for inspections and DUV technology for advanced packaging solutions.
* If you have any inquiries regarding the above presentation, please feel free to contact us.
Presentations:
| 1) Improved ArFi scanner throughput and process yield through a next generation DUV light source featuring high-repetition rate and enhanced speckle contrast [Paper#: 12953-6] |
| 2) Enhancement on productivity and sustainability with the world’s first 6 kHz KrF lightsource G65K [Paper: 13424-61] |
| 3) Improvement of LWR/LER in ArFi lithography by co-optimization of resist formulation and laser E95 [Paper: 13424-79] |
| 4) Challenges associated with increasing the excimer lightsource’s repetition rate above 7kHz to support scanner productivity [Paper: 13424-37] |
| 5) Development of LPP-EUV light source for mask inspection systems [Paper: 13424-59] |
| 6) Simultaneous multi-point glass processing using diffractive optical element and KrF excimer laser [Paper: 13424-55] |
About GIGAPHOTON
Since it was founded in 2000, GIGAPHOTON has delivered valuable solutions to semiconductor manufacturers throughout the world as a manufacturer of lightsources. In every stage from R&D to manufacture, sales, and maintenance services, GIGAPHOTON is committed to providing world-class support delivered from the perspective of everyday users. For more information, please visit https://gigaphoton.com/
| Media Contact: GIGAPHOTON Inc. Corporate Planning Department Takehiko Tomonaga Email: web_info@gigaphoton.com |