4-kHz ArF Excimer Laser for 80-nm Technology Node
Key Features
- Spectral bandwidth (FWHM) improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A
- Use of highly durable parts for each module to prolong the optical module life and further reduce CoO
- Laser chamber: Use of highly durable parts for the electrodes
- Line-narrowing module, monitor module, etc.: Use of highly durable materials for the optics
General Specifications
| Item | Value* |
|---|
| Wavelength | 193 nm |
| Average Output | 20 W |
| Pulse Energy | 5.0 mJ |
| Repetition Rate | 4,000 Hz |
| Bandwidth (FWHM) | 0.3 pm |
| Bandwidth (E95) | 0.75 pm |
(*) Each of the above specification values represents a typical value 
