ArF Dry

ArF Immersion

Data Products


<div class="wp-block-image"><figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="500" height="500" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G41A_500.png" alt="G41A" class="wp-image-7664" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G41A_500.png 500w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G41A_500-300x300.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G41A_500-150x150.png 150w" sizes="(max-width: 500px) 100vw, 500px" /></figure></div>



<h2 class="wp-block-heading" id="4-khz-arf-excimer-laser-for-design-rules-of-up-to-0-10-µm">4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm</h2>



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<h3 class="wp-block-heading" id="main-features">Main Features</h3>



<ul class="wp-block-list"><li>Mounted with a newly designed solid-state pulse power supply that allows a repetition rate of 4000 Hz so as to achieve high throughput</li><li>High-reliability design inherited from our field-proven KrF excimer laser G10K/20K series</li></ul>
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<h3 class="wp-block-heading" id="general-specifications">General Specifications</h3>



<figure class="wp-block-table"><table class="has-fixed-layout"><thead><tr><th>Item</th><th>Value<sup>*</sup></th></tr></thead><tbody><tr><td>Wavelength</td><td>193 nm</td></tr><tr><td>Average Output</td><td>20 W</td></tr><tr><td>Pulse Energy</td><td>5.0 mJ</td></tr><tr><td>Repetition Rate</td><td>4,000 Hz</td></tr><tr><td>Bandwidth (FWHM)</td><td>0.35 pm</td></tr><tr><td>Bandwidth (E95)</td><td>0.85 pm</td></tr></tbody></table><figcaption>(*) Each of the above specification values represents a typical value</figcaption></figure>
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G41A


<div class="wp-block-image"><figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="500" height="500" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT45A_500.png" alt="GT45A" class="wp-image-7624" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT45A_500.png 500w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT45A_500-300x300.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT45A_500-150x150.png 150w" sizes="(max-width: 500px) 100vw, 500px" /></figure></div>



<h2 class="wp-block-heading" id="the-gt45a-adopts-cutting-edge-technology-and-high-functional-augmentability-to-realize-further-productivity-improvements-wafer-output">The GT45A Adopts Cutting-Edge Technology and High Functional Augmentability to Realize Further Productivity Improvements (Wafer Output)</h2>



<p>The GT45A is based on the cutting-edge GT65A light source platform for ArF immersion, and is a model prepared for high functional augmentability.<br>Equipped with the latest model modules for “high availability” and inheriting “helium free” technology from the current model GT40A, improved productivity and environmental load reduction are simultaneously achieved.<br>It meets a wide range of customer needs with improved spectral width stability, variable technology and a maximum possible output of 90 W.</p>



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<h3 class="wp-block-heading" id="benefits">Benefits</h3>



<h4 class="wp-block-heading" id="extended-module-lifespan">Extended module lifespan</h4>



<p>The module lifespan extension technology introduced and achieved with the GT65A is equipped as standard. Contributes to decreased maintenance frequency and improved productivity.</p>



<h4 class="wp-block-heading" id="high-functional-augmentability">High functional augmentability</h4>



<p>Functions and technologies that can be used with the GT65A can be equipped.</p>



<ul class="wp-block-list"><li>Improved CD uniformity through increased spectral width stability</li><li>Compensates for differences in contrast performance in various generations of exposure machines with variable spectral width technology</li><li>Further productivity (throughput) improvements with an oscillation frequency of 6 kHz and a 90 W maximum high output</li><li>Data collection, monitoring and analysis through sMonitoring</li></ul>
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<h3 class="wp-block-heading" id="general-specifications">General Specifications</h3>



<figure class="wp-block-table"><table class="has-fixed-layout"><thead><tr><th>Item</th><th>Value<sup>*</sup></th></tr></thead><tbody><tr><td>Wavelength</td><td>193 nm</td></tr><tr><td>Average Power</td><td>45 &#8211; 90 W</td></tr><tr><td>Pulse Energy</td><td>11.25 &#8211; 15 mJ</td></tr><tr><td>Max Repetition Rate</td><td>4,000 &#8211; 6,000 Hz</td></tr><tr><td>Bandwidth (E95)</td><td>≤ 0.5 pm</td></tr></tbody></table><figcaption>(*) Each of the above specification values represents a typical value.</figcaption></figure>
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GT45A


<div class="wp-block-image"><figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="500" height="500" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT40A_500.png" alt="GT40A" class="wp-image-7623" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT40A_500.png 500w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT40A_500-300x300.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/GT40A_500-150x150.png 150w" sizes="(max-width: 500px) 100vw, 500px" /></figure></div>



<h2 class="wp-block-heading">4-kHz ArF Excimer Laser for 65-nm or below Technology Node</h2>



<p>Model GT40A uses an injection-locking resonator (first in the world) as a lithography tool light source to allow simultaneous maintenance of narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to the lithography tool optics to achieve the lowest running cost in the industry. Model GT40A is also equipped with the newly developed advanced self-diagnosis function as well as it has greatly improved its serviceability such as the ease of module replacement to achieve higher reliability and higher uptime.</p>



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<h3 class="wp-block-heading">Key Features</h3>



<h4 class="wp-block-heading">An injection-locking laser</h4>



<p>The GT40A is the industry’s first mass-production model to use <i>injection-locking</i> technology. This ensures highly stable emission of a DUV beam with high output of 45 W and a spectral bandwidth of 0.2 picometer (pm) for FWHM and 0.5 picometer for E95 — the highest bandwidth level in the industry. It also provides lower peak-pulse energy that reduces damages to the lithography tool optics.</p>



<figure class="wp-block-table is-style-regular"><table><tbody><tr><td><strong>Injection-locking</strong> technology injects a low-output laser beam (master), which is emitted after bring tuned to an extremely narrow spectral bandwidth, into a laser resonator (amplifier) that amplifies it with laser resonation. This technology allows simultaneous maintenance of a narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies.</td></tr></tbody></table></figure>



<h4 class="wp-block-heading">The industry&#8217;s lowest running cost</h4>



<p>The injection-locking technology allows greater reduction of the load upon the laser optics. Furthermore, the system configuration has been refined to significantly reduce both the number of consumables (modules) and their replacement frequency. As a result, the GT40A can achieve the lowest running cost in the industry.</p>



<h4 class="wp-block-heading">A highly reliable/operable design</h4>



<p>The high reliability and high uptime essential to semiconductor factories are achieved by introduction of a newly developed self-diagnosis function and great improvement in the ease of module replacement and serviceability.</p>
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<h3 class="wp-block-heading">General Specifications</h3>



<figure class="wp-block-table is-style-regular"><table class="has-fixed-layout"><thead><tr><th>Item</th><th>Value*</th></tr></thead><tbody><tr><td>Wavelength</td><td>193 nm</td></tr><tr><td>Average Output</td><td>45 W</td></tr><tr><td>Pulse Energy</td><td>11.25 mj</td></tr><tr><td>Repetition Rate</td><td>4,000 Hz</td></tr><tr><td>Bandwidth (FWHM)</td><td>0.2 pm</td></tr><tr><td>Bandwidth (E95)</td><td>0.5 pm</td></tr></tbody></table><figcaption>(*) Each of the above specification values represents a typical value</figcaption></figure>
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GT40A


<div class="wp-block-image"><figure class="aligncenter size-full"><img loading="lazy" decoding="async" width="500" height="500" src="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G42A_500.png" alt="G42A" class="wp-image-7658" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G42A_500.png 500w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G42A_500-300x300.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/G42A_500-150x150.png 150w" sizes="(max-width: 500px) 100vw, 500px" /></figure></div>



<h2 class="wp-block-heading" id="4-khz-arf-excimer-laser-for-80-nm-technology-node">4-kHz ArF Excimer Laser for 80-nm Technology Node</h2>



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<h3 class="wp-block-heading" id="key-features">Key Features</h3>



<ul class="wp-block-list"><li>Spectral bandwidth (FWHM) improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A</li><li>Use of highly durable parts for each module to prolong the optical module life and further reduce CoO</li><li>Laser chamber: Use of highly durable parts for the electrodes</li><li>Line-narrowing module, monitor module, etc.: Use of highly durable materials for the optics</li></ul>
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<div class="wp-block-group"><div class="wp-block-group__inner-container is-layout-flow wp-block-group-is-layout-flow">
<h3 class="wp-block-heading" id="general-specifications">General Specifications</h3>



<figure class="wp-block-table"><table class="has-fixed-layout"><thead><tr><th>Item</th><th>Value*</th></tr></thead><tbody><tr><td>Wavelength</td><td>193 nm</td></tr><tr><td>Average Output</td><td>20 W</td></tr><tr><td>Pulse Energy</td><td>5.0 mJ</td></tr><tr><td>Repetition Rate</td><td>4,000 Hz</td></tr><tr><td>Bandwidth (FWHM)</td><td>0.3 pm</td></tr><tr><td>Bandwidth (E95)</td><td>0.75 pm</td></tr></tbody></table><figcaption>(*) Each of the above specification values represents a typical value</figcaption></figure>
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G41AG41A

4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Main Features

General Specifications

Other ArF Dry

GT45A

GT40A

G42A

Item	Value^*
Wavelength	193 nm
Average Output	20 W
Pulse Energy	5.0 mJ
Repetition Rate	4,000 Hz
Bandwidth (FWHM)	0.35 pm
Bandwidth (E95)	0.85 pm