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Gigaphoton has been selected by the Ministry of Economy, Trade and Industry (METI) as as one of the assignee for the project &#8220;Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems&#8221; and was introduced on the Ministry&#8217;s website.
Please take a look.
Gigaphoton&#8217;s development themes are listed in the following ” 3. Adoption results “
(two PDF files).
<a href="https://www.meti.go.jp/english/press/2021/0616_001.html">Click here for the link.</a>

Gigaphoton has been selected by METI asone of the assignee for the project “Research and Development of Enhanced Infrastructures for Post 5G Information and Communications Systems”.

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc. and has been introduced on their website.
Please take a look.
<a href="https://www.vlsiresearch.com/gigaphoton-honored-with-first-the-best-award-PFEL1SE1000WJOJ#page1">Click here for the link.</a>

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com 
TEL: +81-285-37-6931
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com 
TEL: +81-285-28-8433
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com 
TEL: +81-285-8409/8423
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com 
TEL: +81-285-28-8415
For other inquiries 
Administration Department 
Mayumi Nakamura 
TEL: +81-285-28-8410
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

<h2 class="has-text-align-center wp-block-heading" id="director-senior-executive-officertatsuo-enami">Director Senior Executive Officer Tatsuo Enami</h2>



Since being appointed as the director in June 2017, Dr. Enami has been the head of the corporate planning department with the responsibility of production, sales, customer support and the Singapore business. He also manages the Gigaphoton business and has been exploring the future of Gigaphoton continuously. We extensively interviewed Dr. Enami on the semiconductor industry, how an organization should be, and his dreams.



Dr. Enami, you have a long experience as the head of the sales department. Did your perspective change after becoming the director and head of the corporate planning department?


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Yes, I think it changed. Earlier, my biggest concern was the expansion of the current business. I had focused on how to sell lasers and how to expand the maintenance business associated with it. I used to think that we have to make all possible efforts to bring sales and profit for the company, and this has not changed even now, but after becoming the director, I have started thinking &#8216;How to make this sustainable?&#8217;. Now, while focusing on the development of conventional lithography light sources and &#8220;expansion&#8221; of the sales business, we are also thinking about &#8220;growth&#8221; based on the development and sales of new products that are different from current products. I once again realized that safety and compliance should be our top priority to achieve this goal. The expansion and growth of an organization can only be achieved with a solid foundation, and even if a great product was developed, it may be short-lived with one mistake. I realized that this is the most important factor if Gigaphoton has to progress further.



What do you think is the future of the semiconductor industry? Also, what are your suggestions to realize that future?


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<figure class="alignright size-full"><img loading="lazy" decoding="async" width="272" height="380" src="/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg" alt="" class="wp-image-7947" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg 272w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874-215x300.jpg 215w" sizes="(max-width: 272px) 100vw, 272px" /></figure></div>


Since 2000, electronic devices such as PCs and mobile phones have been the driving force behind semiconductors, and it had been considered that the semiconductor business would reach its peak once the market for such devices is saturated. However, with the advent of concepts like IoT, the semiconductor business has recently started to grow. In IoT, semiconductors are used as sensors rather than as large electronic devices such as smartphones and PCs. The concept is to use sensors in all objects that exist in this world. In other words, applications that are entirely different from the large electronic devices, have emerged. ICT (Information and Communication Technology) has further accelerated and the application scope has expanded infinitely. &nbsp; What do you think about EUV* that is under development?



As there are no light sources with a shorter wavelength than EUV, it is a matter of time before EUV will become the standard light source. However, Gigaphoton has not decided on the timing to start EUV as a business. In any case, since we must contribute to the semiconductor industry through EUV, we will continue to focus on the development without giving up.



How do you think Gigaphoton will progress in the future?



There are two things that Gigaphoton can do. First is to strengthen the existing business of lithography light sources. We have formulated a specific roadmap that includes innovation through hybridization of the gas laser and solid-state laser, enhancing user support through data products and realization of EUV. The second is to utilize our excimer laser technology, which is Gigaphoton’s core competence in other fields. Starting with the development of light sources for annealing and small diameter processing, we have a long-term plan to develop an in-house system.



What do you think is essential for the company to make further progress in the future?



I would like to seek diversification. I want our company to become a group with people from various countries, whose thinking processes are different. So far, we had only Japanese people and were &#8216;happy with the status quo&#8217;, but now, nearly 90% of our customers are from overseas. In that sense, I would like to strengthen our product development and business by incorporating the opinions of people from other countries. Since the product has been globalized and can be used anywhere in the world, what Japanese people think holds good to a certain extent. However, in the case of support, it is a little different. This is because what customers expect differs depending on the country, such as whether the importance is given to &#8220;operation ratio&#8221; or &#8220;performance&#8221;. In that sense, ONE GIGAPHOTON system that started several years back, where field service engineers (FSE) of each country visits other countries, is excellent, as the FSE can experience in person what customers look for depending on the country. I think that in the future, the key will be support and development in anticipation of not only the differences in the workplace but also legal differences, etc.



Please tell us your thoughts on legal compliance and internal control, etc., as a director in charge of compliance.



In the last couple of years, compliance cases, which include internal reporting have increased throughout the Gigaphoton Group. Although this is partly due to the increase in the number of employees, I take a positive view that this is because of the increased awareness about compliance among the employees. However, if a person who has been nurtured through years of training and experience, resigns due to problems with compliance, then the company will lose a significant asset, which is very unfortunate. Therefore, the essential point is to ensure that compliance problems do not occur, for which it is necessary to have methods and mechanisms in place. I think that education is the important key to be able to keep up. We are conducting compliance workshops and plan to promote them in the future as well.



Finally, please tell us about your future dreams.


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Regarding work, as I have mentioned so far, my dream is to achieve stable growth of the company. This is because I want Gigaphoton to grow up to be a company that will be around for 50 to 100 years. I want to continue my studies in business administration, which I have been studying for many years, and publish a few papers. In our business field of lithography equipment, we have manufactured the most precise device ever made in the world, and it is said that there is no other better device. As a person involved with the device, I want to leave the legacy of this device and matters that decide the outcome of business in proper order. In my personal life, my hobbies include appreciation of paintings, and I hope to restart revisiting overseas art galleries. Earlier I used to visit them often, but now I do not have much time. I would especially like to visit the Hermitage Museum in Russia as I have never been there.



*EUV &#8211; Stands for Extreme Ultraviolet which is a lithography technology that uses light sources that emit extremely short wavelength (13.5 nm) light to achieve finer-scale processing.

Leader Interview

<h2 class="has-text-align-center wp-block-heading" id="董事-常务执行董事takashi-saito">董事　常务执行董事 Takashi Saito</h2>



斋藤董事于2017年6月就任董事。2000年，Gigaphoton与优志旺电机开始创办合资企业（2011年解散），斋藤从优志旺电机调往Gigaphoton后转为Gigaphoton的正式员工。曾任开发部副部长、客户支持（CS）部部长，现任EUV开发部部长，同时担任分管激光开发、品质保证的负责人。本次，我们采访了本公司技术开发的关键人物斋藤先生。



斋藤先生担任董事已经一年半了，您认为现在公司面临怎样的课题呢？



<div class="wp-block-image"><figure class="alignleft size-full"><img loading="lazy" decoding="async" width="400" height="267" src="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="" class="wp-image-5781" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg 400w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186-300x200.jpg 300w" sizes="(max-width: 400px) 100vw, 400px" /></figure></div>



<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_3-e1567582613214.jpg" alt="">进入经营决策层，对公司课题的认识比以前更加明确了。短期课题是强化光刻准分子激光(DUV)的竞争力。重点是零部件的长寿命化、能量和波长的稳定性。另外，当务之急是培养能够很好地与现场服务工程师（FSE）和当地法人进行沟通的全球化人才。长期课题是接下来的新业务开展和EUV*的开发。现有的DUV业务很顺利，我想这段时间是个很好的机会。当前需要开发面向平板显示器(FPD)的激光退火业务，并向其它领域发起挑战。不仅仅是光源业务，另外也播下了像FABSCAPE那样的分析用软件的种子，希望它能够早点成为支柱业务之一。关键是能够坚持不懈地做好EUV业务。希望能够充分发挥Gigafton的优势，尽快将其做成商务。



作为EUV开发部长，请斋藤先生谈谈您对EUV的想法。



在光刻行业，新一代光源毫无疑问是EUV，如果没有EUV，对于光源制造厂来说就不能算是最尖端企业。估计在数年后，当DUV实现商品化，全世界都是EUV而自己却没有时，那就失去了在光刻行业生存下去的内在动力。为了避免这一点，我呼吁充分运用本公司的碎片缓解技术，尽快打开局面。



从开始EUV开发算起，已超过15年了吧。



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是啊。就算是DUV，如果象现在一样能够见到效益，大概也需要花费30年左右的时间。小松从2003年左右就开始了EUV研究，而我们公司着手进行研究和开发是在2011年解除了与优志旺的合资之后。虽然历史悠久，但从真正开始开发这层意义上来说，还是最近的事情。在我看来，与DUV相比，EUV在费用方面大不相同，对于本公司的规模来说，这是一项大生意，利用有限的研究经费把这项工作做到现在，我们的精英们做得很好。



您认为Gigaphoton的强项是什么？



我们是一家成立不到20年的公司，刚成立时的成员依然还在，我觉得这是件好事。作为公司的财产，如何把这些人留下的大多数成果进一步发扬光大，我认为这也是一个重要的课题。另外，随着公司的迅速发展，从其他公司也来了很多人，其中有几个人还是目前Gigaphoton的核心人物。这样，在公司的成长过程中，能够很好地吸取外来的血液，这也可以说是我们的一大优势吧。公司高层和负责人员之间没有隔阂，公司充满着自由的风气。另有光刻行业的著名传奇人物担任本公司顾问，我认为这也是一件很好的事情。从这些人那里能够学到很多东西，特别是从事研究开发的人员，我希望他们能向这些顾问们多多学习。



到现在为止，您对自己所经历的事情印象最深的是什么？



首先是2001年我担任开发工作的产品经理时，为现在的业界最大公司OEM开发出了单室方式的ArF准分子激光器。遗憾的是这款产品并不畅销，但是我认为那时候构筑起来的关系与后来双室激光器的销售紧密相连，并且打下了与客户建立良好关系的坚实基础。另外，从2007年开始的5年时间里，我先后担任了CS部的副部长、部长。之前我都是专心从事开发工作，担任领导工作后，刚开始有好多事情都不明白。现在无法想象的是，刚调到CS部的时候有零部件的盘点，那时候，由于一部分业务程序并不完善，出现了很大的差异。尽管如此，当时我心想：“盘点就是这样的吧？”，还是接受了那个盘点报告。当我得知这是异常情况后，我马上将其恢复到正常状态。调动当初完全没有库存管理的感觉，在一瞬间对那种异常没有实际感觉。多亏有了CS部的工作经验，让我学到了销售、服务、库存管理、出口管理、公司的经营体制等知识，觉得非常好。



最后，请齐藤先生谈谈您的梦想。



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<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="">首先，在工作方面，希望Gigaphoton将来能够成为销售额达到1000亿日元的企业。我想其中的关键还是EUV。如果EUV也能做到像现在的DUV一样，就能够实现这一目标。个人生活方面，每年都与家人和朋友去露营，已经持续了大约20年，不过，最近孩子长大了，各种准备工作几乎都是他们完成的。因此，我打算接下来体验一下夫妻二人的野营车旅行。然后乘坐各地的豪华列车旅行也不错。如果能够拥有闲暇时光，那我刚才说的目标就能够实现。



＊EUV）是一种采用被称为极端紫外线(EUV)的、波长非常短(13.5 nm)的光的光刻度技术，通过使用EUV光源，能够进行更微细的加工。

领袖专访

<h2 class="has-text-align-center wp-block-heading" id="总裁katsumi-uranaka">总裁 Katsumi Uranaka</h2>



我们就Gigaphoton今后的商业话题、对员工的期待、个人梦想等，采访了于2017年4月1日就任的浦中社长。



Gigaphoton以“Challenge for NEXT Growth”为口号，将2016年度定位为“第二个创业期”。请谈谈这句口号所蕴含的商业价值和今后的展望。



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好的，Gigaphoton目前为止的商业框架只集中在半导体光刻用准分子激光器（下称光刻用激光器）。但是，今后我们将不局限于这一领域，希望能够拓展EUV（极端紫外线光源：被称为新时代的光刻光源）、将准分子激光器应用在不同于以往的领域的新商业 “GIGANEX”。EUV在去年实现了输出250瓦特和转换效率（针对输入的输出量）5％的目标，客户对我们的期待也有所提高。2017年，我们计划向客户介绍EUV的计划。关于新商业“GIGANEX”，在去年3月退火用准分子激光器打入FPD（平板显示器）新领域，之后出库订单也不断增加。在作为第2个创业期的2016年度以后，将光刻用激光器、EUV、GIGANEX这3个领域作为商业支柱是我们对未来成长发起的挑战。此外，在2017年7月，我们将建造新工厂，由此生产能力将进一步得到提升。这也蕴含我们将向下一个成长发起挑战的意义。



这意味着能够清楚地看到Gigaphoton未来愿景呢。 今后将发起各种挑战，而光刻用激光器业务将成为公司的基础，那么，今后将如何开展业务呢？



近几年来，Gigaphoton在光刻用激光器领域获得了大多数客户的信任，在全球占据了超过50%的市场份额。但是，我们不能就此满足，而是要不断重新审视当前状况，持续进行“KAIZEN”，努力为客户提供快速且优质的商品和服务。这种积累会帮助我们成为对客户而言“不可或缺的公司”。希望能够这样与客户建立起双赢关系，与客户一同成长。



光刻市场正在从成长市场转变为成熟市场，您打算如何予以应对？



几乎没有能够永远持续的商业领域。的确我也能感到这个市场已趋于饱和，但为了开拓IoT和客户，我们采取了进驻中国市场等应对措施，尽管目前处于成熟期，但我们仍有不少的商机，因此本公司绝不会错过这个机会，我们将切实实现自己的成长。



您如何看待在中国的业务？



就像我前面所说的，目前许多客户都计划在中国进行大型投资，今后中国是一个非常重要的成长市场。在这样的环境下，我们希望根据客户的商业速度，及时建立服务网点，以万无一失的态势，尽可能为客户提供支持，从而帮助客户顺利地完成生产。由于中国的商业发展速度极快，因此我们首先必须跟上中国的发展速度，这点非常重要。



浦中先生就任社长后，希望将未来的Gigaphoton打造成怎样的公司？



<div class="wp-block-image"><figure class="alignleft size-full is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1.jpg" alt="" class="wp-image-5025" width="300" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1.jpg 440w, https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1-214x300.jpg 214w" sizes="(max-width: 440px) 100vw, 440px" /></figure></div>



首先，我希望将公司打造成一家极具速度感的公司。无论面对任何事物，都希望能采取“不用考虑过多，总之先尝试”的态度。也就是以极快的速度，不断进行试错。这是因为如果速度达到原来的3倍，即使失败2次，也可以重新开始。例如，必须在6个小时内解决某个课题，如果花费6个小时，只有1次机会，而如果只需花费2个小时，那就有2次重新开始的机会。如果有信心能一次完成，那只需花费时间，进行1次尝试即可，但如果没有信心，那还是需要提高速度，进行数次挑战比较好。在重复尝试的过程中，会不断绞尽脑汁地进行改善，例如下一次调整这里，下一次这样尝试。这个过程非常重要，这样才能获得较好的结果。另一点是信息传递的速度。作为机构，必须统一各个部门之间的节奏，加快决策传递的速度，需要达到如同一个部门的速度。这就是迅速行动的秘诀。特别是在这个行业，速度就是生命。有时客户昨天还说会来购买，但今天却又说不需要了。希望大家清楚意识到，无法及时应对变化的公司是无法在这个世界上生存下去的。



为了提升信息传递速度，必须采取哪些措施？



基本是加快管理层的判断速度。因为判断是管理层的工作。而管理层无法判断的事项就必须迅速上报上司。如果上司也无法做出判断，就继续上报。这个流程必须确保通畅，这点非常重要。其中特别重要的是如何将“无法判断”的事项及时上报。这不仅是在商业方面，在合规性方面也很重要。汇报不良消息和火灾是一样的。在最初问题较小时，如果能够迅速应对，就能立即解决，但如果在哪个环节出现滞留，火势就会越烧越猛，在问题上报到高层时，往往已经演变成大问题。另外，即使公司发生了大问题，如果能够在4小时之内将信息上报至高层，也一定会得到解决，不会发生严重的事故。这样的信息传递速度是非常重要的。此外，掌握关键的是中层管理人士，因此提升他们的水平和意识也是非常重要的。



您对员工有什么期待吗？



我希望我的员工无论身处什么位置，都能够意识到自己是一名专业人士，必须充满自信，并在工作时，随时与客户保持联系。必须时刻思考客户想要什么，如何提高客户的满意度，然后采取行动。之后就是注意安全、健康、合规性。希望大家牢记这个基础是第一位的。因此，公司会为各位员工提供舒适的工作环境，让大家能够满意地开展工作。



浦中先生，最后请谈谈您的梦想。



<div class="wp-block-image"><figure class="alignright size-medium"><img loading="lazy" decoding="async" width="300" height="214" src="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1-300x214.jpg" alt="" class="wp-image-5026" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1-300x214.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1.jpg 600w" sizes="(max-width: 300px) 100vw, 300px" /></figure></div>



我想去南极看企鹅（笑）。在我年轻的时候，深受西堀荣一郎（第一次南极观测队副队长兼越冬队长）先生著作的影响，一直想去南极看看。以前小松有制作南极观测队的雪地机动车，每年都会派人前去维护，因此我抱着也许可以去南极的想法，选择进入小松就职。在实际的入社考试中，我把自己的想法告诉了当时的经营管理层，结果却被告知：“很遗憾地告诉你，去南极的人已经确定了。”（笑）。现在，我只能将其作为退休后的乐趣，希望到时能在南极近距离看到几万只野生企鹅，这就是我现在的梦想。在实现这个梦想的时候，我想我会拍下照片，上传到脸书上（笑）。

<h2 class="has-text-align-center wp-block-heading" id="高级研究员沟口-计">高级研究员 沟口　计</h2>



从技术观点角度，您认为 GIGAPHOTON 今后最急需的是什么？



最急需的当然是可正常运转的 HVM（量产）用 EUV 光源。但是像中层的其他各层用 ArF 激光，我想也会持续研制。如此一来，ArF 激光需要进一步的更新以及提升商品竞争力。我们希望藉此在 EUV、Deep EUV 两方面拿下全球第一。



今后 GIGAPHOTON 面临的最大挑战是什么？



<div class="wp-block-image"><figure class="alignleft size-full is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2.jpg" alt="" class="wp-image-1330" width="400" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2.jpg 600w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2-300x225.jpg 300w" sizes="(max-width: 600px) 100vw, 600px" /></figure></div>



GIGAPHOTON 是以准分子激光技术起家，要想历经多年后依然稳居全球龙头，或是不断朝第一宝座冲刺，就要看人才了。人才要教育，优秀人才要能聘用，让 GIGAPHOTON 成为优秀人才趋之若鹜的公司。到目前为止，公司主要由创业以来的人才们领军发展，但为了今后的永续发展，公司必须持续让新世代工程师能挥洒能力。这些，也就是挑战吧。



再者就是信息。公司对外也应维持稳健的网络。譬如：以往多是与国内大学进行合作，今后也要与海外研究机构、其他公司／业界持续合作。我们并不是全能，专精的技术当然在公司内精益求精，但不甚擅长的技术就要借重其他公司／业界的力量。当然也不是不考虑从零开始的方法，但这样会来不及。总之就是以最快的脚步持续挑战全球第一的目标。



次世代半导体制造技术虽有多种选择，您认为今后技术朝向的方向性会在何处？



截至目前，技术随着时代而切换不已，而今后我认为将是多种技术并存的时代。当然现在已经是这样的状况，但今后将越来越明显。然后呢，半导体组件的种类也越来越多，将由比以往更广泛的组件形成半导体的需求基准。以前是以 PC 为中心，目前则是智能手机、平板电脑等装置爆发性的扩散。今后可能会有更多方面的发展。



GIGAPHOTON 希望在其中发展哪种技术？



首先要在光刻坦途打一场胜仗。光刻是我们的一个重要商务，也是支撑业界的一项关键科技。主力自然要善加经营。坦途自然要光明正大走，但也不光是走着，还要看清目前是小众却可能有日后发展潜力的事物并加以吸收。希望能有更大的野心。



GIGAPHOTON 拥有技术的最大强项是什么？



<div class="wp-block-image"><figure class="alignright size-medium"><img loading="lazy" decoding="async" width="225" height="300" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3-225x300.jpg" alt="溝口計" class="wp-image-1331" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3-225x300.jpg 225w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3.jpg 450w" sizes="(max-width: 225px) 100vw, 225px" /></figure></div>



GIGAPHOTON 对于独特的构思会及早吸收。光是这样，其他创新企业也能办到，但我们更有将吸收的构思打造成技术的韧性。此外，一旦发现行不通就立即改变的转换速度。最大的强项就是这三项吧。



目前的 EUV 虽是以二氧化碳激光与微液滴冷却的形式构成，但一开始并非如此，实际是在 2002 年起至 2007 年止约 5 年时间试遍各种方法后，才获得这个结果。准分子激光也是到了 1998 年左右才形成目前的方式。在此之前，我们是有方法就试试看，找出最佳的结果，才形成现在的成果。结果来说，所谓的独特方法，重点在于遇到没有人做的方法就试试看，而且要用别人的 3、4 倍速度尝试。因为办到了，所以我们活了下来。GIGAPHOTON 的具体强项，我想就在这里了。



要发挥他人 3、4 倍的速度，要下哪些功夫？



<div class="wp-block-image"><figure class="alignleft size-medium is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1-225x300.jpg" alt="" class="wp-image-1329" width="200" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1-225x300.jpg 225w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1.jpg 450w" sizes="(max-width: 225px) 100vw, 225px" /></figure></div>



应该是动头脑吧。在脑海中模拟，一面预测结果一面执行。时间不足以让我们尝试所有的方法，但我以为其中先以理智而非经验考虑事物进行预测，就能以他人未及的新作法提早求出正确答案。



此外，让技术人员能够大鸣大放，这点非常重要。虽然难，但是非做不可。要制作世上没有的东西，集合众人智慧很重要，倾听非经验者的意见也很重要。技术这东西很有趣，积累越多经验就增加更多知识，却也受到过去经验的限制。而前所未有的全新构思常会潜藏在没有经验的人们纯真的发言当中。我说的就是要活用这方面。就这方面来说，经验较浅的年轻人亦有其存在价值。



接下来，GAPHOTON 最想对客户宣扬的是什么？



希望宣扬 GIGAPHOTON 是研发独家技术完成最佳 HVM 用产品的专业厂商。我深信这样的精神，即使跨足不同的激光应用领域，也必将成功。

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Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Technical Papers in SPIE Advanced Lithography 2021

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