ArF Immersion

ArF Dry

Data Products

事件

其他

專訪

新聞發布

獎項

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc. and has been introduced on their website.
Please take a look.
<a href="https://www.vlsiresearch.com/gigaphoton-honored-with-first-the-best-award-PFEL1SE1000WJOJ#page1">Click here for the link.</a>

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Gigaphoton will present the following papers at the &#8220;<a href="https://spie.org/search?term=gigaphoton&amp;pageSize=25&amp;pagesVisited=1&amp;sortBy=Relevance&amp;eventName=Advanced_Lithography">SPIE Advanced Lithography 2021</a>&#8221; digital forum, to be held on February 22 (Sun.) through 26 (Thu.) 2021.
This conference is one of the largest event of advanced lithography for semiconductor manufacturing.
Gigaphoton presents following 8 papers discussing advanced lightsource technology which improves yield and availability for semiconductor manufacturing.
 
<ul>
<li>Oral Presentation</li>
</ul>
February 25, 2021 • 10:50 AM PST | Session 11: EUV Source [Extreme Ultraviolet (EUV) Lithography XII] 
Update of &gt;300W High Power LPP-EUV Source Challenge III for Semiconductor HVM                 
Author: Hakaru Mizoguchi; Gigaphoton Inc. (Japan) 
[Paper#: 11609-48]
February 24, 2021 • 9:40 AM PST | Session 4: Lithography Equipment and New Applications [Optical Lithography XXXIV] 
Latest ArF light source with speckle reduction technology for immersion lithography improving chip yield               
Author: Hirotaka Miyamoto; Gigaphoton Inc. (Japan) 
[Paper#: 11613-11]
February 25, 2021 • 8:50 AM PST | Session 8: Novel Optical and ebeam/ion [Novel Patterning Technologies 2021] 
Processability of organic material for semiconductor packaging by 248 nm excimer laser               
Author: Akira Suwa; Gigaphoton Inc. (Japan) 
[Paper#: 11610-27]
<ul>
<li>Poster Presentation</li>
</ul>
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
ArF lightsource “GT66A” for next-generation immersion lithography enhancing EPE and CD performance                
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-30]
February 24, 2021 • 5:30 PM PST | Poster Session [Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV] 
Study of further CD and OL performance improvement by introducing new E95% spectral bandwidth and Wavelength functionality for ArFi lithography lightsource              
Author: Tommy Oga; Gigaphoton Inc. (Japan) 
[Paper#: 11611-92]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Advanced spectral engineering: A new way of process aware laser spectra optimization for optical lithography   
Author: Koichi Fujii; Gigaphoton Inc. (Japan) 
[Paper#: 11613-33]
February 24, 2021 • 5:30 PM PST | Poster Session [Optical Lithography XXXIV] 
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi Light source         
Author: Takehiko Tomonaga; Gigaphoton Inc. (Japan) 
[Paper#: 11613-29]
February 24, 2021 • 5:30 PM PST | Poster Session [Extreme Ultraviolet (EUV) Lithography XII] 
The development progress of the High Power LPP-EUV light source using a magnetic field 
Author: Hirokazu Hosoda; Gigaphoton Inc. (Japan) 
[Paper#: 11609-52]

Technical Papers in SPIE Advanced Lithography 2021

On January 13, in order to avoid the spread of the new coronavirus throughout the country, the Japanese government has extended the declaration of a state of emergency to seven prefectures (from 14 January to 7 February), including Tochigi Prefecture, where Gigaphoton&#8217;s headquarters are located.
We will continue to produce, supply equipment and parts to the customers, and provide service and support to the semiconductor fabs, as we are required by the authority to continue business even under the declared emergency situation. We will also continue to carefully check the production and supply capacity of our suppliers.
＜Our countermeasures against new coronavirus infection&gt;
<ol>
<li>Mandatory hand-washing and mask wearing</li>
<li>Employee temperature check every morning</li>
<li>Distribution of the New Coronavirus Infection Response and Employee Behavior Manual</li>
<li>Prohibition of unnecessary  business trips, both domestic and overseas, except for service support.</li>
<li>Telecommuting for all employees who are able to work from remote locations</li>
<li>Recommendation of online meetings with customers and suppliers.</li>
</ol>
*If you have any questions, please contact us at the contact information below.
We offer our deepest condolences to those who have died due to the Coronavirus (COVID-19) and wish a speedy recovery of infected people and sincerely hope that the infection will be contained soon
GIGAPHOTON INC. 
President and CEO
Katsumi Uranaka
<table width="662">
<tbody>
<tr>
<td width="662">Media inquiries 
Corporate Planning Department 
Kenji Takahisa: web_info@gigaphoton.com 
TEL: +81-285-37-6931
For inquiries regarding supply chain 
Purchasing Section 
Production Department 
Hidenobu Kameda: hidenobu_kameda@gigaphoton.com 
Rika Shimizu: rika_shimizu@gigaphoton.com 
TEL: +81-285-28-8433
For inquiries regarding service support and distribution 
Customer Support Department 
(Japan) Takayuki Mizokami: takayuki_mizokami@gigaphoton.com 
(Overseas) Kenny Oka: kenji_oka@gigaphoton.com 
TEL: +81-285-8409/8423
For inquiries regarding business discussions 
Sales Department 
Kiyotaka Uchida: kiyotaka_uchida@gigapoton.com 
TEL: +81-285-28-8415
For other inquiries 
Administration Department 
Mayumi Nakamura 
TEL: +81-285-28-8410
Overseas Offices Contact Information
Gigaphoton Korea 
史承學 (Seung Hak, Sa): sh_sa@gigaphoton.com
Gigaphoton Taiwan 
Eiji Miyamoto:  eiji_miyamoto@gigaphoton.com 
呉健賢: ken_wu@gigaphoton.com
Gigaphoton China 
Daisuke Satou: daisuke_satou@komatsu.com.cn 
何胜杰: heshengjie@komatsu.com.cn
Singapore Branch 
Jason Lim: Jason_lim@gigaphoton.com
Gigaphoton USA 
Dennis Smith  dennis.s@gigaphotonusa.com 
James Graves james.g@gigaphotonusa.com
Gigaphoton Europe 
Erik de Bekker  GPE_inquiry@gigaphoton.com</td>
</tr>
</tbody>
</table>

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

<h2 class="has-text-align-center wp-block-heading" id="director-senior-executive-officertatsuo-enami">Director Senior Executive Officer Tatsuo Enami</h2>



Since being appointed as the director in June 2017, Dr. Enami has been the head of the corporate planning department with the responsibility of production, sales, customer support and the Singapore business. He also manages the Gigaphoton business and has been exploring the future of Gigaphoton continuously. We extensively interviewed Dr. Enami on the semiconductor industry, how an organization should be, and his dreams.



Dr. Enami, you have a long experience as the head of the sales department. Did your perspective change after becoming the director and head of the corporate planning department?


<div class="wp-block-image">
<figure class="alignleft size-full is-resized"><img decoding="async" src="/wp-content/uploads/2019/09/Enami_1-e1568958100881.jpg" alt="" class="wp-image-5786" width="400" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Enami_1-e1568958100881.jpg 600w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Enami_1-e1568958100881-300x200.jpg 300w" sizes="(max-width: 600px) 100vw, 600px" /></figure></div>


Yes, I think it changed. Earlier, my biggest concern was the expansion of the current business. I had focused on how to sell lasers and how to expand the maintenance business associated with it. I used to think that we have to make all possible efforts to bring sales and profit for the company, and this has not changed even now, but after becoming the director, I have started thinking &#8216;How to make this sustainable?&#8217;. Now, while focusing on the development of conventional lithography light sources and &#8220;expansion&#8221; of the sales business, we are also thinking about &#8220;growth&#8221; based on the development and sales of new products that are different from current products. I once again realized that safety and compliance should be our top priority to achieve this goal. The expansion and growth of an organization can only be achieved with a solid foundation, and even if a great product was developed, it may be short-lived with one mistake. I realized that this is the most important factor if Gigaphoton has to progress further.



What do you think is the future of the semiconductor industry? Also, what are your suggestions to realize that future?


<div class="wp-block-image">
<figure class="alignright size-full"><img loading="lazy" decoding="async" width="272" height="380" src="/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg" alt="" class="wp-image-7947" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874.jpg 272w, https://webapi.gigaphoton.global/wp-content/uploads/2022/04/Enami_2-e1568958041874-215x300.jpg 215w" sizes="(max-width: 272px) 100vw, 272px" /></figure></div>


Since 2000, electronic devices such as PCs and mobile phones have been the driving force behind semiconductors, and it had been considered that the semiconductor business would reach its peak once the market for such devices is saturated. However, with the advent of concepts like IoT, the semiconductor business has recently started to grow. In IoT, semiconductors are used as sensors rather than as large electronic devices such as smartphones and PCs. The concept is to use sensors in all objects that exist in this world. In other words, applications that are entirely different from the large electronic devices, have emerged. ICT (Information and Communication Technology) has further accelerated and the application scope has expanded infinitely. &nbsp; What do you think about EUV* that is under development?



As there are no light sources with a shorter wavelength than EUV, it is a matter of time before EUV will become the standard light source. However, Gigaphoton has not decided on the timing to start EUV as a business. In any case, since we must contribute to the semiconductor industry through EUV, we will continue to focus on the development without giving up.



How do you think Gigaphoton will progress in the future?



There are two things that Gigaphoton can do. First is to strengthen the existing business of lithography light sources. We have formulated a specific roadmap that includes innovation through hybridization of the gas laser and solid-state laser, enhancing user support through data products and realization of EUV. The second is to utilize our excimer laser technology, which is Gigaphoton’s core competence in other fields. Starting with the development of light sources for annealing and small diameter processing, we have a long-term plan to develop an in-house system.



What do you think is essential for the company to make further progress in the future?



I would like to seek diversification. I want our company to become a group with people from various countries, whose thinking processes are different. So far, we had only Japanese people and were &#8216;happy with the status quo&#8217;, but now, nearly 90% of our customers are from overseas. In that sense, I would like to strengthen our product development and business by incorporating the opinions of people from other countries. Since the product has been globalized and can be used anywhere in the world, what Japanese people think holds good to a certain extent. However, in the case of support, it is a little different. This is because what customers expect differs depending on the country, such as whether the importance is given to &#8220;operation ratio&#8221; or &#8220;performance&#8221;. In that sense, ONE GIGAPHOTON system that started several years back, where field service engineers (FSE) of each country visits other countries, is excellent, as the FSE can experience in person what customers look for depending on the country. I think that in the future, the key will be support and development in anticipation of not only the differences in the workplace but also legal differences, etc.



Please tell us your thoughts on legal compliance and internal control, etc., as a director in charge of compliance.



In the last couple of years, compliance cases, which include internal reporting have increased throughout the Gigaphoton Group. Although this is partly due to the increase in the number of employees, I take a positive view that this is because of the increased awareness about compliance among the employees. However, if a person who has been nurtured through years of training and experience, resigns due to problems with compliance, then the company will lose a significant asset, which is very unfortunate. Therefore, the essential point is to ensure that compliance problems do not occur, for which it is necessary to have methods and mechanisms in place. I think that education is the important key to be able to keep up. We are conducting compliance workshops and plan to promote them in the future as well.



Finally, please tell us about your future dreams.


<div class="wp-block-image">
<figure class="alignleft size-medium"><img loading="lazy" decoding="async" width="300" height="214" src="/wp-content/uploads/2022/01/image-3-300x214.png" alt="" class="wp-image-7693" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2022/01/image-3-300x214.png 300w, https://webapi.gigaphoton.global/wp-content/uploads/2022/01/image-3.png 460w" sizes="(max-width: 300px) 100vw, 300px" /></figure></div>


Regarding work, as I have mentioned so far, my dream is to achieve stable growth of the company. This is because I want Gigaphoton to grow up to be a company that will be around for 50 to 100 years. I want to continue my studies in business administration, which I have been studying for many years, and publish a few papers. In our business field of lithography equipment, we have manufactured the most precise device ever made in the world, and it is said that there is no other better device. As a person involved with the device, I want to leave the legacy of this device and matters that decide the outcome of business in proper order. In my personal life, my hobbies include appreciation of paintings, and I hope to restart revisiting overseas art galleries. Earlier I used to visit them often, but now I do not have much time. I would especially like to visit the Hermitage Museum in Russia as I have never been there.



*EUV &#8211; Stands for Extreme Ultraviolet which is a lithography technology that uses light sources that emit extremely short wavelength (13.5 nm) light to achieve finer-scale processing.

Leader Interview

<h2 class="has-text-align-center wp-block-heading" id="董事-常務執行董事takashi-saito">董事　常務執行董事 Takashi Saito</h2>



2017年6月，齋藤先生就任本公司董事。2000年，Gigaphoton与優志旺電機開始創為合資企業（於2011年解除合資關係）。齋藤董事原為優志旺電機派赴Gigaphoton的人員，之後轉任為公司正式職員，歷任開發部副部長、客戶支援（CS）部長等職務，目前擔任EUV開發部長兼雷射開發暨品質保證執行董事，為本公司技術開發之要。這一次，我們將對齋藤董事進行深入訪問。



齋藤先生就任董事已有一年半的時間，您認為當前公司的課題有哪些？


<div class="wp-block-image">
<figure class="alignleft size-full"><img loading="lazy" decoding="async" width="400" height="267" src="/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="" class="wp-image-5781" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg 400w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_1-e1567582429186-300x200.jpg 300w" sizes="(max-width: 400px) 100vw, 400px" /></figure></div>


<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_3-e1567582613214.jpg" alt="">加入經營高層之後，公司的課題更加明確。短期方面，要強化微影準分子雷射（DUV）的競爭力，尤以零件長壽化、能量和波長穩定性為重點。此外，也深切感受到培育能與現場服務工程（FSE）或各當地法人間縝密溝通的人才之急切與必要性。長期方面，則是發展新的商機以及EUV＊的開發。目前，既有DUV商務推展順利，我認為這段期間實為大好良機。當前將會發展平面顯示器（FPD）退火用雷射的商務，同時也會挑戰其他領域。另外，不僅是光源商務，像是FABSCAPE等分析軟體也已經播下種子，這部分也希望能早日茁壯，形成另一支商務上的台柱。EUV能堅持發展到什麼境地，會是一個關鍵。我非常期盼Gigaphoton的強項能夠獲得實證，早日形成商機。



齋藤董事身為EUV開發部長，能否描述一下您對EUV的想法？



在微影這一塊，次世代光源毫無疑問將是EUV的天下，沒有EUV，就無法號稱走在光源製造商的最前端。也許再過幾年，當DUV大眾化、EUV機種開始在市場上出現時，我們卻沒有這樣的產品，作為一家在微影業界努力的企業，不是一件非常令人沮喪的事嗎？為了不致如此，我認為要廣為宣揚本公司碎片清除技術的強項，並儘早切入商機。



EUV從開發至今，已經超過15個年頭了呢。


<div class="wp-block-image">
<figure class="alignright size-medium"><img loading="lazy" decoding="async" width="258" height="300" src="/wp-content/uploads/2019/09/Saito_3-e1567582613214-258x300.jpg" alt="" class="wp-image-5780" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_3-e1567582613214-258x300.jpg 258w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_3-e1567582613214.jpg 274w" sizes="(max-width: 258px) 100vw, 258px" /></figure></div>


是的。不過，DUV如今能夠盈利，前前後後也是走過了大約30年的時光。EUV雖然在2003年就由小松製作所展開研究，但公司則是在2011年解除和優志旺電機合資之後，方才展開這方面的研究與開發。研究歷史雖然長，但就正式開發的意義來看，也不過是近幾年的事。EUV的費用和DUV的相比多出了一個位數，就公司規模來說是非常龐大的商機，卻有一種由少數菁英在有限研究經費下居然能有此成果的印象。



您覺得Gigaphoton的強項是什麼？



公司創立將屆20週年，當初的元老成員依然健在，我認為這是好事，而如何將他們留下的諸多碩果，作為公司資產好好傳承下去，也是一項課題。此外，隨著公司急遽成長，許多人由其他公司轉入，其中有幾位已經成為Gigaphoton的中流砥柱。每當公司成長，都能順利由外界吸收新血，也可說是一種強項，我想，這應該是高層與負責業務者之間幾無隔閡的公司自由風氣所導致。此外，多位人稱微影業界傳奇的有名人士也以顧問身份接受本公司的聘請，我覺得這是非常棒的一件事。他們有太多值得學習之處，尤其對於研發人員來說，希望能夠吸收得越多越好。



在您的經歷中，最令您難忘的事是什麼？



首先是2001年在任職開發專案經理的時候，著手開發了供應目前業界最大企業的OEM單腔ArF準分子雷射。雖然銷售成績並不佳，但我覺得當時結下的緣分，為日後的雙腔雷射機種販售鋪路，更為目前與客戶的良好關係打下了基礎。其次是自2007年起的5年，我在CS部先後就任副部長、部長。原本的我只懂開發，可說是在一無所知的情況下開始做起。或許從現在的我來看很難想像，但剛調任CS部時，我正好遇上庫存零件盤點，當時因為部分業務程序不周，盤點結果差異得很離譜，然而我卻認同了那份結果報告，覺得「盤點大概就是這樣」；後來才知道那是異常，並趕緊將其恢復正常，但調任當初一點庫存管理的概念都沒有，無法立即察覺異常呢。因為CS部的歷練，讓我學會了販售、客服、庫存管理、出貨管理等公司流程，令我深感慶幸。



最後，想請教齋藤董事的夢想是？


<div class="wp-block-image">
<figure class="alignleft size-medium"><img loading="lazy" decoding="async" width="300" height="200" src="/wp-content/uploads/2019/09/Saito_2-e1567582361196-300x200.jpg" alt="" class="wp-image-5779" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_2-e1567582361196-300x200.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2019/09/Saito_2-e1567582361196.jpg 600w" sizes="(max-width: 300px) 100vw, 300px" /></figure></div>


<img decoding="async" src="http://localhost:8081/wp-content/uploads/2019/09/Saito_1-e1567582429186.jpg" alt="">嗯，先說工作方面吧。我期盼Gigaphoton將來能躋身為營銷額1000億日幣的企業，而其關鍵仍然在於EUV。如果EUV也能形成像目前DUV般的商機，我認為很有可能實現。而在私人方面，近20年來我每年會和家人或是同好前往露營。最近孩子們長大了，行前準備幾乎都是他們來完成，所以，我會想和妻子兩個人嘗試露營車之旅。還有，到各地搭乘豪華列車旅行似乎也不錯。前面說的雖然都是將來的願景，但只要慢慢的把時間空出來，我會想要圓了這個夢想。



＊EUV）是使用通稱極紫外線（EUV）之極短波（13.5 nm）光線的微影技術。使用EUV光源，就可進行更精密的加工。

領袖專訪

<h2 class="has-text-align-center wp-block-heading" id="總裁katsumi-uranaka">總裁 Katsumi Uranaka</h2>



2017年4月1日就職的浦中總裁，在本次訪談中，談到今後對Gigaphoton事業的想法、對員工的期待以及對個人的夢想等。



Gigaphoton提出了「Challenge for NEXT Growth」的口號，並將2016年度定位為「第二創業期」。請教您這句話涵蓋的願景以及今後的展望。



<div class="wp-block-image"><figure class="alignleft size-full"><img loading="lazy" decoding="async" width="600" height="400" src="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka1a1.jpg" alt="" class="wp-image-5024" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka1a1.jpg 600w, https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka1a1-300x200.jpg 300w" sizes="(max-width: 600px) 100vw, 600px" /></figure></div>



好的。Gigaphoton目前為止的事業主體，都集中在半導體用準分子雷射（以下稱光刻用雷射）。然而，今後將不侷限於此，像是擴展EUV（極端紫外線光源：被稱為「次世代光刻光源」），或是在與目前領域截然不同的應用準分子雷射的新事業「GIGANEX」。EUV在去年終於達到期盼已久的輸出250瓦以及轉換功率（相對於輸入的輸出量）5%，客戶對此也深具期待。2017年，我們計畫會將EUV介紹給客戶。此外，關於新事業「GIGANEX」，在去年3月，針對FPD（平板顯示器）這個新領域的退火用準分子雷射終於得以出貨，之後出貨訂單也在增加中。如此一來，定位為第二創業期的2016年度以後，將以光刻用雷射、EUV、GIGANEX這三大項為事項棟樑，朝向我們未來的成長挑戰。此外，2017年7月新廠完成後，產能也將更為提升。這些都代表邁向下階段成長的挑戰。



感覺是可以明確看到Gigaphoton未來事業的訪談內容呢！ 您說，今後的種種挑戰，還是以光刻用雷射事業為根基，那麼，請教今後打算如何開展呢？。



這幾年Gigaphoton在光刻用準分子雷射領域受到許多客戶的信賴，因此全球市占率達50%以上。然而，我們並不以此自滿，經常檢視現況，不斷地「改善 (KAIZEN)」，為能更速迅地供應客戶更優良的商品與服務而努力。這些努力的累積，希望能成為對客戶而言「不可或缺的企業」。我們希望像這樣建立起與客戶間win-win的關係，與客戶共同持續成長。



據了解，光刻市場已經從成長轉變為成熟，對此您將如何發展呢？



幾乎沒有什麼事業是能夠永久持續的。的確，我們對於這個市場即將見頂並非無感，但藉由IoT、進軍中國來擴大客戶等因應，相信在成熟期的現階段還是有事業發展的可能，本公司也不會錯失機會，將會穩健地持續成長。



您如何看待前往中國的發展？



先前也提到過，現在有許多客戶計畫在中國的大型投資，未來會是持續成長非常重要的市場。其中，我們將配合客戶的事業腳步建立無縫接軌的服務，以萬全的態勢透過支援，對客戶的順利生產做出貢獻。中國的事業腳步迅速，首先要致力跟上腳步才是最重要的。



浦中先生接任總裁後，希望今後Gigaphoton發展成什麼樣的企業呢？



<div class="wp-block-image"><figure class="alignleft size-full is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1.jpg" alt="" class="wp-image-5025" width="300" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1.jpg 440w, https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka2a1-214x300.jpg 214w" sizes="(max-width: 440px) 100vw, 440px" /></figure></div>



首先，希望成為具有速度感的企業。希望無論對任何事物都抱持著「凡事不要想太多，先做看看」的態度。換言之，就是抱持著速度感，勇敢地嘗試錯誤。這是因為，若比別人快三倍的速度，即使失敗了兩次還能補救得來。舉例來說，某個問題必須在六小時內解決不可，若花上六小時的話就只有一次機會，但若兩小時就能因應的話，還有兩次重來的機會。雖說，若是有自信耗費較長時間可以做到絕對沒問題的話，花時間做一次的嘗試也無妨；但若沒有自信的話，那麼在相同的時間內，加快速度，爭取更多次的機會更好。在反覆操作的過程中，下次改善這裡，再下次這麼做，由此產生出智慧與改善。這個過程很重要，我認為這麼做，就會產生良好的結果。另外，還有一項就是資訊傳達的速度。確實地整合組織間的部門，如同一個部門般地快速傳達意思。這就是迅速運作的祕訣。特別是在這個業界裡，迅速就是關鍵。昨天還說要購買的，今天卻說不要了，經常也是有這樣的情形。因此我希望能經常抱持，不迅速因應變化的企業就無法在競爭的世界中存活下來的意識。



資訊傳達的速度提升上，有什麼必要的作為嗎？



基本上，管理階層的判斷速度要快。因為判斷就是管理階層的工作。還有，在特定管理階層無法判斷的案件，就迅速地上報主管。該主管仍無法判斷時，再往上級。像這樣的流程順暢運作非常的重要。其中，特別重要的是「無法判斷」的事如何儘早地往上傳達。指的不僅是事業，從守規的觀點來看也很重要。不良資訊的流傳就像燎原的火災般，最初問題還小時不迅速應對，明明是馬上可以解決的事，卻因為在某個環節上停滯而使得火勢逐漸擴大，經常這樣的問題傳達到高層時，已經演變成大問題了。此外，好比說，有公司對於發生的大問題，規定四小時內要通報到高層，這樣在尚未釀成大禍前一定能獲得解決吧。這就是資訊傳達速度的重要性。另外，掌握關鍵的就是中間管理階層的這群人，因此提升他們的程度及危機意識變得非常重要。



您對員工有什麼樣的期待？



要說到期待的話，就是希望無論在哪個位階都能抱持專業的意識與自豪，工作上總是誠實地面對客戶。客戶期望的產品、如何才能提高滿意度，希望員工行動時經常以此為念。還有就是要經常留意安全、健康與守規。這些基本的內容是最重要的內容，希望員工們都不要忘記忽略了。為達此目的，公司就要提供讓每位員工都滿意、易於工作及勞動的環境。



最後請浦中先生談談您的夢想。



<div class="wp-block-image"><figure class="alignright size-medium"><img loading="lazy" decoding="async" width="300" height="214" src="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1-300x214.jpg" alt="" class="wp-image-5026" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1-300x214.jpg 300w, https://webapi.gigaphoton.global/wp-content/uploads/2017/06/Uranaka3a1.jpg 600w" sizes="(max-width: 300px) 100vw, 300px" /></figure></div>



想去南極看企鵝呢（笑）。年輕的時候，受到西堀榮一郎（第一次南極觀測隊副隊長兼越冬隊長）先生的著作影響，就一直想去南極看看。以前小松曾經製作南極觀測隊的雪上車，每年會派人前往維修保養，我想那樣的話就能去南極了吧，這是我應徵小松最大的動機。實際通過入社測驗，接受經營階層面試時提到這件事，卻被回答說：「小子，很可惜那工作已經有特定的人了，所以很困難哦。」（笑）現在我只能期待退休後來實現，什麼時候才能近距離親眼在南極看到幾萬隻的野生企鵝，就是我現今的夢想。夢想實現時，我會拍照片上傳到臉書哦（笑）。

<h2 class="has-text-align-center wp-block-heading" id="溝口-計">高級研究員 溝口　計</h2>



由技術觀點角度，您認為 GIGAPHOTON 今後最急需的是？



最急需的當然是可正常運轉的 HVM（量產）用 EUV 光源。但是像中層的其他各層用 ArF 雷射，我想也會持續研製。如此一來，ArF 雷射需要進一步的更新以及提升商品競爭力。我們希望藉此在 EUV、Deep EUV 兩方面拿下全球第一。



今後 GIGAPHOTON 面臨的最大挑戰為何？



<div class="wp-block-image"><figure class="alignleft size-full is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2.jpg" alt="" class="wp-image-1330" width="400" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2.jpg 600w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi2-300x225.jpg 300w" sizes="(max-width: 600px) 100vw, 600px" /></figure></div>



GIGAPHOTON 是以準分子雷射技術起家，要想歷經多年後依然穩居全球龍頭，或是不斷朝第一寶座衝刺，就要看人才了。人才要教育，優秀人才要能聘用，讓 GIGAPHOTON 成為優秀人才趨之若鶩的公司。到目前為止，公司主要由創業以來的人才們領軍發展，但為了今後的永續發展，公司必須持續讓新世代工程師能揮灑能力。這些，也就是挑戰吧。



再來就是資訊。公司無論對內對外，應維持穩健的網絡外。譬如：以往多是與國內大學進行合作，今後也要與海外研究機構、其他公司／業界持續合作。我們並不是全能，專精的技術當然在公司內精益求精，但不甚擅長的技術就要借重其他公司／業界的力量。當然也不是不考慮從零開始的方法，但這樣會來不及。總之就是以最快的腳步持續挑戰全球第一的目標。



次世代半導體製造技術雖有多種選擇，您認為今後技術朝向的方向性會在何處？



截至目前，技術隨著時代而切換不已，而今後我認為將是多種技術並存的時代。當然現在已經是這樣的狀況，但今後將越來越明顯。然後呢，半導體元件的種類也越來越多，將由比以往更廣泛的元件形成半導體的需求基準。以前是以 PC 為中心，目前則是智慧手機、平板電腦等裝置爆發性的擴散。今後可能會有更多方面的發展。



GIGAPHOTON 希望在其中發展何種技術？



首先要在微影坦途打一場勝仗。微影是我們的一個重要商務，也是支撐業界的一項關鍵科技。主力自然要善加經營。坦途自然要光明正大走，但也不光是走著，還要看清目前是小眾卻可能有日後發展潛力的事物並加以吸收。希望能有更大的企圖心。



GIGAPHOTON 擁有技術的最大強項是？



<div class="wp-block-image"><figure class="alignright size-medium"><img loading="lazy" decoding="async" width="225" height="300" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3-225x300.jpg" alt="溝口計" class="wp-image-1331" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3-225x300.jpg 225w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi3.jpg 450w" sizes="(max-width: 225px) 100vw, 225px" /></figure></div>



GIGAPHOTON 對於獨特的構思會及早吸收。光是這樣，其他創新企業也能辦到，但我們更有將吸收的構思打造成技術的韌性。此外，一旦發現行不通就立即改變的轉換速度。最大的強項就是這三項吧。



目前的 EUV 雖是以二氧化碳雷射與微液滴冷卻的形式構成，但一開始並非如此，實際是在 2002 年起至 2007 年止約 5 年時間試遍各種方法後，才獲得這個結果。準分子雷射也是到了 1998 年左右才形成目前的方式。在此之前，我們是有方法就試試看，找出最佳的結果，才形成現在的成果。結果來說，所謂的獨特方法，重點在於遇到沒有人做的方法就試看看，而且要用別人的 3、4 倍速度嘗試。因為辦到了，所以我們活了下來。GIGAPHOTON 的具體強項，我想就在這裡了。



要發揮他人 3、4 倍的速度，要下哪些功夫？



<div class="wp-block-image"><figure class="alignleft size-medium is-resized"><img decoding="async" src="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1-225x300.jpg" alt="" class="wp-image-1329" width="200" srcset="https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1-225x300.jpg 225w, https://webapi.gigaphoton.global/wp-content/uploads/2013/06/mizoguchi1.jpg 450w" sizes="(max-width: 225px) 100vw, 225px" /></figure></div>



應該是動頭腦吧。在腦海中模擬，一面預測結果一面執行。時間不足以讓我們嘗試所有的方法，但我以為其中先以理智而非經驗考慮事物進行預測，就能以他人未及的新作法提早求出正確答案。



此外，讓技術人員能夠大鳴大放，這點非常重要。雖然難，但是非做不可。要製作世上沒有的東西，集合眾人智慧很重要，傾聽非經驗者的意見也很重要。技術這東西很有趣，累積越多經驗就增加更多知識，卻也受到過去經驗的限制。而前所未有的全新構思常會潛藏在沒有經驗的人們純真的發言當中。我說的就是要活用這方面。就這方面來說，經驗較淺的年輕人亦有其存在價值。



接下來，GAPHOTON 最想對客戶宣揚的是？



希望宣揚 GIGAPHOTON 是研發獨家技術完成最佳 HVM 用產品的專業廠商。我深信這樣的精神，即使跨足不同的雷射應用領域，也必將成功。

NewsNews

Gigaphoton has won The Best Supplier in WFE Subsystems Award from VLSI Research, Inc.

Technical Papers in SPIE Advanced Lithography 2021

The Impact of the Japanese Government’s Declaration of a State of Emergency (6th Report)

Leader Interview

領袖專訪

領袖專訪

領袖專訪